Individual Gallium Oxide Nanowires for Humidity Sensing at Low Temperature

Gallium oxide nanowires (NWs) were synthetized using a vapor-liquid-solid route via carbothermal reduction. These NWs were characterized using XRD, SEM and TEM as well as photoluminescence spectroscopy, confirming their crystalline nature. Gas sensors, based on individual NWs, deposited on suspended microhotplates, were tested towards several gases of interest at different temperatures. The sensing towards relative humidity provided the best results, with responses up to 20% at room temperature (~25 °C)