This paper presents an efficient and high-sensitive micro-sensor designed for wall shear stress measurement. The main technical application targeted is flow separation detection for closed-loop active flow control. The sensor is a temperature-resistance transducer operating on heat transfer. The device is micro-structured with three substrate-free wires presenting a high aspect ratio, and periodic perpendicular micro-bridges ensuring mechanical toughness and thermal insulation. This design achieves a homogeneous temperature distribution along the wires. Welded on a flexible printed circuit, the sensor is wall-mounted on a wind tunnel. The experiments, conducted in both attached and separated flow configurations, demonstrate the sensor sensi...
Four types of micromachined polysilicon structures have been designed and fabricated for wall shear ...
In this paper we present for the first time, a novel silicon on insulator (SOI) complementary metal ...
Four types of micromachined polysilicon structures have been designed and fabricated for wall shear ...
This paper presents an efficient and high-sensitive micro-sensor designed for wall shear stress meas...
This paper reports a calorimetric micro-sensor designed for aerodynamic applications. Measuring both...
International audienceWe present an efficient and high-sensitive thermal micro-sensor for near wall ...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
Hot-wire microsensors for the purpose of measuring the instantaneous velocity gradient close to a wa...
Hot-wire microsensors for the purpose of measuring the instantaneous velocity gradient close to a wa...
International audienceA new type of hot wire anemometer was developed by using surface micro machini...
International audienceA new type of hot wire anemometer was developed by using surface micro machini...
Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. T...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. T...
A micro-floating element wall shear stress sensor with backside connections has been developed for a...
Four types of micromachined polysilicon structures have been designed and fabricated for wall shear ...
In this paper we present for the first time, a novel silicon on insulator (SOI) complementary metal ...
Four types of micromachined polysilicon structures have been designed and fabricated for wall shear ...
This paper presents an efficient and high-sensitive micro-sensor designed for wall shear stress meas...
This paper reports a calorimetric micro-sensor designed for aerodynamic applications. Measuring both...
International audienceWe present an efficient and high-sensitive thermal micro-sensor for near wall ...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
Hot-wire microsensors for the purpose of measuring the instantaneous velocity gradient close to a wa...
Hot-wire microsensors for the purpose of measuring the instantaneous velocity gradient close to a wa...
International audienceA new type of hot wire anemometer was developed by using surface micro machini...
International audienceA new type of hot wire anemometer was developed by using surface micro machini...
Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. T...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. T...
A micro-floating element wall shear stress sensor with backside connections has been developed for a...
Four types of micromachined polysilicon structures have been designed and fabricated for wall shear ...
In this paper we present for the first time, a novel silicon on insulator (SOI) complementary metal ...
Four types of micromachined polysilicon structures have been designed and fabricated for wall shear ...