Nanomanipulators with Reduced Hysteresis and Interferometers Build in NanoFabs

The use of nanomanipulators made from monocrystals with many times less hysteresis and creep compared with polycrystal piezoelectric ceramics makes it possible to achieve the following results: A two-fold reduction in the measurement time (by using reverse scanning information), as well as reduction in the error compensation time during displacement; A ten-fold reduction in the positioning time in NanoFab during vector positioning instead of raster scanning; Integration of standards of length (measures of displacement) with actuators (piezoelectric manipulators). Nanomanipulators based on different directions of the crystallographic axes ensure displacements in the vertical direction up to 120 nm and in the horizontal direction up to 600 nm. Homodyne interferometers installed in NanoFab are characterized by a measurement uncertainty of 0.1-0.3 nm