Development and simulations of Enhanced Lateral Drift Sensors

We present the concept of a new type of silicon tracking sensor called Enhanced Lateral Drift (ELAD) sensor. In ELAD sensors the spatial resolution of the impact position of ionising particles is improved by a dedicated charge sharing mechanism, which is achieved by a non-homogeneous electric field in the lateral direction in the sensor bulk. The non-homogeneous electric field is created by buried doping implants with a higher concentration with respect to the background concentration of the bulk. The resulting position-dependent charge sharing allows for an improved interpolation of the impact position. TCAD-based electric field simulations for 2D and 3D geometries as well as transient simulations with a traversing particle for the 2D geometry have been carried out.The electric field profiles have further been optimised for position resolution.The simulations show a strong dependence of the charge sharing mechanism on the buried implant concentration.Optimal values for the buried implant concentration allow for nearly linear charge sharing between two readout electrodes as a function of the impact position.Additionally, the foreseen production technique combining silicon epitaxy and ion beam implantation is outlined