Video 1: Dynamic movement of the MEMS grating OPA under low frequency actuation. Video captured in the experiment showing top view of a laterally moving MEMS OPA element. The time scale is 0-9 seconds. The actuation voltage is a 6Hz sinusoidal signal with Vpp = 10V
This video demonstrates the impact of the microsphere on the resonant frequency of the AFM cantileve...
We measure the motional fluctuations of a micromechanical mirror using a Michelson in-terferometer, ...
This thesis formulates, implements and validates an integrated framework for analysing Micro-Electro...
Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to e...
A fully integrated optical and electrical measurement system made of off-the-shelf optical component...
A simple optical method is proposed for performing in-plane experimental modal analysis of micromach...
Visualization 2 shows a movie of transient vibrations in an AFM cantilever excited with a linear chi...
Visualization 1 shows a movie of transient vibrations in an AFM cantilever excited with a sinc pulse...
MEMS gyroscope performs as a sort of sensor to detect angular velocity, with diverse applications in...
This animated video, created by Support Center for Microsystems Education (SCME), illustrates the n...
This paper outlines the design and performance of an oscillator that incorporates a new type of MEMS...
Taking advantage of an off-the-shelf, high-quality but inexpensive optical detector, namely a DVD op...
We present the system design and open loop positioning of a large displacement (approximately 25 μm)...
Micro-Electro-Mechanical Systems, or MEMS, is a technology of very small scale devices. The dimensio...
Micro-Electro-Mechanical Systems, or MEMS, is a technology of very small scale devices. Th...
This video demonstrates the impact of the microsphere on the resonant frequency of the AFM cantileve...
We measure the motional fluctuations of a micromechanical mirror using a Michelson in-terferometer, ...
This thesis formulates, implements and validates an integrated framework for analysing Micro-Electro...
Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to e...
A fully integrated optical and electrical measurement system made of off-the-shelf optical component...
A simple optical method is proposed for performing in-plane experimental modal analysis of micromach...
Visualization 2 shows a movie of transient vibrations in an AFM cantilever excited with a linear chi...
Visualization 1 shows a movie of transient vibrations in an AFM cantilever excited with a sinc pulse...
MEMS gyroscope performs as a sort of sensor to detect angular velocity, with diverse applications in...
This animated video, created by Support Center for Microsystems Education (SCME), illustrates the n...
This paper outlines the design and performance of an oscillator that incorporates a new type of MEMS...
Taking advantage of an off-the-shelf, high-quality but inexpensive optical detector, namely a DVD op...
We present the system design and open loop positioning of a large displacement (approximately 25 μm)...
Micro-Electro-Mechanical Systems, or MEMS, is a technology of very small scale devices. The dimensio...
Micro-Electro-Mechanical Systems, or MEMS, is a technology of very small scale devices. Th...
This video demonstrates the impact of the microsphere on the resonant frequency of the AFM cantileve...
We measure the motional fluctuations of a micromechanical mirror using a Michelson in-terferometer, ...
This thesis formulates, implements and validates an integrated framework for analysing Micro-Electro...