Design and Fabrication of Micro Mechanism by Two-Photon Polymerization Technique

雙光子聚合為一種可以以市售之光感材料與直接雷射加工的方法製造任意三維度空間之微米結構或微米裝置。近年來微米級裝置被廣泛地製作，例如：微型過濾器、微型光柵、微型針頭等。首先了解了雙光子聚合技術的概念後，接著架設了由飛秒雷射組成的雙光子聚合微製造系統並藉由基本的實驗了解光敏材料的性質。有了基礎的概念後，藉由電腦輔助設計軟體開發參數化建模技術，以便隨時調整適當參數，並產生機構模型。接著將模型切層、轉成微製造系統得以用來直接雷射加工之資料。製造過程中，玻片載著光敏材料固定在壓電平檯上，藉由控制平檯的移動與雷射的開關，經過聚焦的雷射在液態材料中移動並固化所經過的路徑，以堆疊製造成所需求之結構。成果為：微型日內瓦機構、微型齒輪機構、微型齒輪對機構成功地製造，不僅證實雙光子聚合可以製造精巧的機構，更使雙光子微製造技術更為進步。另外，被製造的微機構以光鉗與攪拌器測試了其可動性並得到結果。最後：結果、結論與建議列在論文最後提供參考。Two-photon polymerization (TPP) is a technique to fabricate arbitrary three dimensional (3D) structures or devices in microscale through direct laser writing (DLW) in commercially available photosensitive materials. In recent years, micro devices such as micro filter, micro grating, and micro needles have been fabricated widely. By knowing the concept of TPP, a TPP system with a picosecond laser was set up. Experiments were carried out for understanding the properties of photosensitive materials. Mechanism’s model was generated by parametric modeling technique with CAD software and then sliced into layers for DLW fabrication. Dialog program was also developed for the convenience of adjusting design parameters. During fabrication, a microscope slide was set on a movable piezo stage and with photosensitive material on it. By controlling piezo stage and laser, the focal spot of laser moved in the photosensitive resin and thus integrating structures. The results showed that micro-Geneva mechanism, micro-gear mechanism were fabricated successfully. This work shows the feasibility of fabricating sophisticated 3D micro mechanisms by TPP and will advance TPP micro fabrication. On the other hand, rotary test was carried out by using an optical tweezer and stirrer to show the movability of the micro mechanisms. Finally, the result, conclusions and suggestions are listed for consultation