Process Parameters and Mechanical Properties of Two-Photon Polymerization Microfabrication

雙光子聚合TPP利用高解析度的雙光子雷射聚焦點，製作微米以及次微米等級之複雜立體結構，並被廣泛應用在微機電系統製造、微機械結構製造、生物醫療微元件製造等領域。然而，目前關於TPP製造的相關文章多集中在光敏樹脂之原料開發、製作平台的自動控制、以及複雜結構的製造可行性上，對於結構之機械性質的研究討論則較為不足。由於TPP微製造之物件多應用在微米或次微米等級，因此無法使用傳統機械性質量測方法評估(例如：拉伸試驗、斷裂試驗等)的情況下，本研究利用光鉗拉動的方法來量測TPP微構件的楊氏係數，並透過調整雷射光點之功率、改變點資料之密度、UV紫外曝光，觀察其楊氏係數的變化趨勢；除此之外，在TPP微結構製作過程中，也遇到了的相關製造問題，並提出可能的解決方案，希望能為更多之後有志於利用TPP來製作微結構的研究人員，提供一些樣品製作上的參考和依據。Two-Photon Polymerization (TPP) was an accurate manufacturing method with high resolution focal spot for micron and sub-micron level complex structure. It was generally applied for MEMS, micro mechanical components, biomedical micro elements and other engineering fields. Previously, researches were concentrated on the development of photosensitive resins, control of the fabrication stage and the capability of manufacturing complicated structures, and less relative researches for the mechanical properties. However, in practice, we would need to realize the mechanical properties like young’s modulus to design the component. Because the structure of TPP was micron scale, conventional measure method like tensile and fracture test was difficult to implement. Therefore, in this thesis, we would apply optical tweezer to drag the cantilever beam, and obtain the deflection to derive the Young’s modulus. Moreover, by adjusting the parameter of laser power, distance of voxel and UV light exposal time, we could understand the relationship between young’s modulus and these parameters. Furthermore, during manufacturing the cantilever beam assembly, we had some experience for decreasing the fail rate of TPP. We would discussed those items and provide some possible solutions in this thesis. By knowing the parameter of mechanical properties, we believe the application of TPP would be extended widely in the future