Infrared Sensor by Inkjet Printing Cytochrome C on Suspending Aluminum Electrodes of Post CMOS Process

細胞色素C（一種蛋白質）的製程薄膜已經有些論文發表過具有很高的電阻溫度係數（TCR），在這個碩士論文中，我們做了一系列的實驗來分析細胞色素C，而這些細胞色素C是一種動物性蛋白質，在波段8-12微米處有約65%的吸收率。首先，我們探索了材料表面的現象因而得知表面粗糙度與材料電阻的大小有高度的相關性。之後我們設計了一系列的測量發現，細胞色素C雖然在溶液中會提高蛋白質溶液的TCR，但是本身的導電性並不理想，所以需要緩衝溶液像是電解液般地提高蛋白質溶液的導電導，然而隨著緩衝液的加入卻會降低蛋白質溶液的TCR。換句話說，這是一個比例拿捏的問題。知道蛋白質溶液中細胞色素C與緩衝溶液的性質後，我們選擇了最佳配置比例的蛋白質溶液作為感測材料。接著設計感測晶片，我們所設計的晶片上，微感測結構結合了CMOS讀取電路，再用噴墨機將蛋白質溶液滴在感測晶片的像素結構上。電阻溫度係數、熱導度、時間常數與響應度分別是25.98 %/K、7.96E-5 W/K、1.094ms 與 2.57E+5 V/W at 2μA。測試完晶片之後，我們可以初步了解到感測晶片大致上的運作狀況。根據這個實驗中，微型感測計的陣列可以作為今後的工作去做進一步的設計。The cytochrome c (protein) thin film has been reported high temperature coefficient of resistance (TCR). In this paper, we conducted a series of experiment to analyze the property of Cytochrome C protein. The absorption coefficient is measured around 65% in 8~12 μm. We found that the surface roughness resulted in the resistance difference. We discovered that Cytochrome C protein raised TCR of sensing material, but it conductivity is low. Therefore, the buffer solution was needed acting as electrolyte to increase electrical conductance and keep the PH value at 7. However the buffer solution diluted the Cytochrome C solution. After knowing the property of the protein solution, we selected the best preparing ratio of the protein solution as the sensing material. We designed CMOS circuit to integrate with cytochrome c protein as a microbolometer. The MEMS structure was based on the working formula, and then the protein solution was put on the sensing pixel by using inkjet printer. The chip’s TCR, thermal conductance, time constant and responsivity were 25.98 %/K, 7.96E-5 W/K, 1.094ms and 2.57E+5 V/W at 2μA. In the long run, the fabrication of microbolometer was successfully compatible with CMOS process