Design and Development of a Uniaxial Precision Aerostatic Actuation Platform with Vibration Isolation and Research on Its Performance

本論文整合矩形氣靜壓軸承及平行流場式精密調壓閥開發出高精密度位移致動平台。矩形氣靜壓軸承藉由分離式概念完成節流孔實體設計，其中雙列徑向複合節流孔可提供致動器抵抗外界力矩的能力，同時減少致動過程中的摩擦力，使致動精度提昇；而軸向孔口節流孔由於擁有高負載能力之特性，因此可配合輸入氣體壓力差達成致動平台往復致動的目標。平行流場式精密調壓閥採用改變長度及流道造型之概念來調整進入致動平台的氣體壓力。性能分析探討上則透過有限元素分析及實驗找出矩形氣靜壓軸承之負載能力與間隙關係，以及平行流場式精密調壓閥之輸出壓力差與作動角度之關係。The thesis presents a design of a novel aerostatic linear actuation platform and precise pressure regulator. The rectangular aerostatic bearing is divided into three parts to accomplish the radial and axial restrictor. The radial compound restrictors in double rows have sufficient stiffness to against the pitching moment. Furthermore, the frictionless aerostatic film can support the actuator to increase the actuation accuracy. Two axial orifice restrictors provide outstanding loading capacity for the actuator and realize reciprocating actuation through regulation of their differential pressure. By using the parallel-field concept, the precise pressure regulator is accomplished through variation of length and shape of the flow channel, and it can further regulate the supply pressure for the actuator. For studying and verifying the performance, the finite element analyses and the experiments are carried out to find out the relationship between the loading capacity and the air gap, and the relationship between the differential pressure and the regulating angle of the precision pressure regulator.口試委員審定書 I謝 II文摘要 III文摘要 IV錄 V目錄 VII目錄 VIII號表 XI一章 緒論 1.1 研究背景與動機 1.2 文獻回顧 2.3 研究目標與章節架構 5二章 氣靜壓式精密定位減振平台 7.1 總系統和子系統說明 7.2 設計概念 8三章 氣體軸承 14.1 氣體軸承分類與特色 14.2 氣靜壓軸承定位及減振原理 17.3 節流方式對軸承性能的影響探討與選定 22.3.1 負載能力 23.3.2 運轉安定性 32.3.3 導引誤差 35.4 節流元件幾何尺寸對致動器性能的影響探討與最佳化 38.4.1 負載能力與運轉安定性 38.5 方柱形氣靜壓軸承致動系統之設計概念與實體化設計 44.5.1 設計概念 44.5.2 實體化設計 47四章 調壓閥 54.1 簡介 54.2 調壓方式之比較與探討 55.2.1 平行流場式調壓法之原理及性能分析 57.2.2 垂直流場式調壓法之原理及性能分析 59.2.3 設計方案選取 62.3 精密調壓閥之設計概念與實體化設計 64五章 氣靜壓式精密單軸定位減振平台之性能測試 67.1氣靜壓式精密單軸定位減振平台定位與性能測試 67.1.1 測試裝置 67.1.2 供氣壓力與間隙對平台負載能力及減振能力的影響 68.1.3 精密調壓閥對平台定位及動態特性的影響 73六章 總結與未來展望 87考文獻 88錄 9