The Performance Improvement and Development of Ambient Control System in All Ink-Jet Printed Flexible Organic Electronic Devices

近年來，由於有機電子材料的發展，使得有機材料在軟性電子的應用上不再只是空想。現階段有機電子相關產品的研究所在多有，舉凡 PLED、OLED、太陽能電池、電子紙、RFID 標籤甚或是有機感測元件，皆能透過有機材料以及相關製程技術來實現。為了能夠製作有機電子於軟性基板之上，多半採用溶液製程的方式來執行，利用此種方式也可以達到低成本、高精度、節能以及低溫製程的需求。 本論文中利用光機電整合之方式，搭配壓電噴頭、液氣壓控制、墨滴觀測、移動平台以及定位程式等裝置，開發出全噴墨有機薄膜電晶體製程。利用此噴墨系統，搭配環境控制、材料改質、表面處理以及溫度調控等方式，製作出軟性有機薄膜電晶體。 在有機薄膜電晶體的製作過程中，透過製程環境的控制，提高有機材料噴印的穩定性以及 OTFT 電性表現，並且利用表面改質以及絕緣材料的參雜，藉此提高有機薄膜電晶體的性能表現。Owing to the improvement of organic electronics material, organic material can actually be applied to the flexible electronics. Nowadays there is extensive research n different applications of organic electronics, like PLED, OLED, solar cells, e-paper, and RFID tags. Even organic sensors can be produced by organic materials with specific fabrication process. In order to fabricate organic electronics components on flexible substrate solution process is often adopted. In this thesis, combined with opto-mechatronics, an all inkjet printing process based on printing system including piezoelectric print head, liquid/gas control subsystem, drops observation subsystem, positioning subsystem, was developed. With this inkjet printing system and ambient control subsystem, organic thin film transistors can be fabricated successfully by material modifying, surface treatment and thermal modulating . In the fabrication process of this organic thin film transistor, the stability of printing process and the performance of OTFT can be raised by the mbient control system. The performance of transistors can also be improved by changed surface treatment and doped insulator materials.謝誌.......................................................i文摘要.................................................iiibstract..................................................iv錄.......................................................v目錄..................................................xiii 1 章 緒論...............................................1-1 前言...................................................1-2 有機薄膜電晶體簡介.....................................6-3 研究背景..............................................10-4 研究動機..............................................28 2 章 材料介紹與應用....................................30-1 軟性基板..............................................30-2 導電材料..............................................34-3 絕緣層材料............................................41-4 半導體層材料..........................................49 3 章 噴墨製程平台及簡介................................53-1 噴墨原理..............................................53-2 正負壓調控裝置........................................56-3 訊號產生介面..........................................57-4 載台移動裝置..........................................58-5 圖形製作與噴印........................................60-6 墨滴觀測設備..........................................62-7 噴墨製程之應用........................................65 4 章 環境控制系統......................................71-1 外部簡易環境系統......................................72-2 內部手套箱系統........................................74 5 章 OTFT噴墨製程......................................76-1 噴印流程..............................................76-2 清洗噴與測試..........................................77-3 噴印電極..............................................78-4 噴印絕緣層............................................81-5 噴印半導體層..........................................85-6 封裝..................................................86-7 量測儀器與設備........................................87 6 章 結果與討論........................................91-1 單絕緣層OTFT..........................................91-2 雙絕緣層OTFT..........................................95-3 絕緣層表面粗糙度對OTFT電性之影響......................99-4 環境控制下之OTFT結果.................................101 7 章 結論.............................................106考文獻.................................................10