The study of the production control strategy for integrated dispatching rule in semiconductor manufacturing system

由於半導體製程相當複雜且繁瑣，造成晶圓製造廠現場監控的生產管理十分困難，然而派工法則是目前實務上解決晶圓製造廠現場監控問題最普遍的方法。Dabbas等人[2001][2003a,b]針對多樣生產績效最佳化提出一綜合型派工法則實驗研究，研究中考量四項因子-交期、加工時間、機台利用率及生產平衡，其結果顯示運用此一新的綜合型派工法則，同時提昇了準時交貨率與平均生產週期時間等生產績效，進而改善了大多數派工法則只提升系統單一特定績效的弊病，但文獻中並未考慮投料法則、交期指派法則與機台預防保養等策略，只針對單一課題-派工法則作考量，至今也並無學者提出一整合性的生產控制策略，以至於無法針對各種生產情境選用最佳之綜合型派工法則。 因此，本研究進一步將生產控制策略做一整合性研究，針對各種生產情境尋求最佳綜合派工法則之模式，首先加入投料法則、交期指派法則與當機模式等三項因子，以建構出八種不同的生產情境。其次，針對八種不同的生產情境建立八組優先線上模組，利用實驗設計方法學與最佳化方法尋求各種不同生產情境之最佳綜合派工法則模式。最後，經由分析得出，對準時交貨率、延遲變異數、平均生產週期時間與生產週期時間變異數等各種生產績效的影響而言，綜合型派工法則較單一派工法則平均有10~20%的提昇程度。因此，本研究提出生產控制策略之整合性研究，進而發展出各種生產情境下之最佳綜合派工法則模式，使整體生產績效達到更有效地提昇。The semiconductor manufacturing process is very complicated. This makes the shop floor control difficult. The use of a suitable dispatching rule is the current method to reduce the shop floor control problems. As known those dispatching rules used are aimed at a single purpose. They are good from one aspect but not good from other aspects. Dabbas et al. [2001][2003a,b] proposed a combined dispatching criteria approach to meet multiple production purposes. In their study, they considered four factors, job critical ratio, job processing time, machine utilization, and line balance. From their simulation results, it shows the combined job dispatching method does provide better performances on both the on time delivery and the mean cycle time. However, in their study, they did not include the shop floor control strategy such as due date assignment calculation method, order release policy and total preventive maintenance (TPM) strategy. Is the combined dispatching method still better than others under different control strategy? The main purpose of this study is to propose an integrated job dispatching rule that including shop floor strategies. In this thesis, three shop control strategies, due date assignment, order release, and TPM, are considered, and 8 different scenarios are established. Based on Dabbas et al.’s method, in this thesis, 8 priority on-line modules are developed for each scenario. For comparison purpose, besides the priority on-line modules are used as the job dispatching method in the simulations, the single purpose dispatching rules, CR and SPT, are also used to perform simulations. The simulation results show the proposed integrated method provides 10% to 20% improvement on the on time delivery, variance of the on time delivery, mean cycle time, and variance of the mean cycle time. The integrated job dispatching method ensures the performance of the shop floor control.目 錄 致謝………………………………………………………………………I 中文摘要………………………………………………………………...II 英文摘要………………………………………………………………..IV 目錄……………………………………………………………………...V 圖目錄………………………………………………………………...VIII 表目錄…………………………………………………………………. XI 第一章 緒論……………………………………………………………..1 1-1研究背景與動機………………………………………………...1 1-2研究目的………………………………………………………...4 1-3研究方法與步驟………………………………………………...4 第二章 文獻回顧………………………………………………………..6 2-1 派工法則文獻回顧……………………………………………..6 2-1-1 一般派工法則回顧…………………………………...….7 2-1-2 批量機台派工法則回顧…………………………….….10 2-2 投料法則文獻回顧…………………………………………....12 2-3 交期指派法則文獻回顧………………………………………15 第三章 研究基礎………………………………………………………17 3-1 研究範圍………………………………………………………17 3-2 晶圓製造廠現場生產特性分析………………………………17 3-3 綜合型派工法則之研究方法…………………………………21 3-4 利用願望函數求得最佳化設計………………………………22 3-5 Meta-Models的建立…………………………………………...24 第四章 整合性現場監控策略之研究方法與實驗規劃………………26 4-1 交期指派法則…………………………………………………26 4-2 投料法則………………………………………………………28 4-3 綜合派工法則…………………………………………………30 4-3-1 單一派工法則之優先權值……………………………..30 4-3-2 綜合優先權值…………………………………………..33 4-4 生產環境因子說明……………………………………………34 4-5 生產績效之評比分析…………………………………………35 4-6 實驗設計………………………………………………………37 4-6-1 尋求權重值……………………………………………..38 4-6-2 變異數分析……………………………………………..48 4-6-3利用最佳化技術尋求最佳綜合派工法則模式………...50 4-7 最佳綜合派工法則與最佳單一派工法則之比較……………55 4-8 小結……………………………………………………………55 第五章 整合性現場監控策略之模擬研究……………………………56 5-1 模擬實驗平台構建……………………………………………56 5-1-1 製程及機台設備介紹…………………………………..57 5-1-2 系統假設………………………………………………..57 5-1-3 系統環境描述…………………………………………..58 5-1-4 模擬模型建構…………………………………………..63 5-2 生產監控策略模擬實驗………………………………………67 5-2-1 模擬條件說明…………………………………………..69 5-2-2 生產績效模擬實驗分析………………………………..69 5-3 利用最佳化技術尋求最佳綜合派工法則模式……………..127 5-4 綜合派工法則與最佳單一派工法則之比較分析…………..148 5-5 小結…………………………………………………………..158 第六章 總結…………………………………………………………..159 6-1 結論…………………………………………………………..159 6-2 未來研究方向………………………………………………..160 參考文獻………………………………………………………………161 附錄……………………………………………………………………166 附表A產品製程資料表………………………………………….166 附表B加工機台資料表…………………………………………..16