Development of Vibration Mitigation Device Effectiveness Monitoring System in Southern Taiwan Science Park

近年來半導體產業在台灣蓬勃發展，帶動了台灣經濟的成長。隨著半導體製程的進步，晶圓廠對於微振動的容忍程度卻因為生產時需要更高的精度而降低。然而台灣兩大重要計畫:高速鐵路及南部科學園區，卻因地峽人稠而被迫緊緊相鄰。因此高速列車行駛所引起之振動問題便受到各界的關注。 本研究旨在針對為避免高速列車所造成之振動影響園區內精密工業所採用的複合減振系統建立一長期運作的監測系統。 監測系統分作兩部份: (1) 南科園區環境振動監測: 監測高鐵列車引致地表振動量，監測地點分在園區內減振工程施作區與園區外無減振施作區各選一條量測線，分別量測距高鐵中心線0m,100m,200m,400m,600m等距離之振動量，以其比較減振效果。 (2) 摩擦連接器螺栓固鎖監測 : 減振工程中利用摩擦連接器以摩擦力連接基礎加勁塊與高架橋基礎，而摩擦力與固鎖螺栓的軸向力有關，本文針對摩擦連接器各項固鎖力學特性監測，以確定減振效能。Taiwan’s semiconductor industry is booming these years, speeds up the economic growth in Taiwan. With the improvement of semiconductor processing, wafer factories are becoming more sensitive to micro- vibrations because of the precision requirement during production. But two national scale projects of Taiwan: Taiwan High Speed Railway (THSR) and Tainan Science Park (TSP) are compelled to be adjacent. So the “high speed rail vibration problem” receives the attention from the circles. The purpose of this article is to develop a long-term continuous monitoring system to observe the Hybrid Vibration Mitigation System (HVMS) which is used to prevent the ground vibration caused by passing trains from impacting the vibration-sensitive factories in the science park. The monitoring system contains two major parts: (1) Ground vibration measurements in TSP: To monitor the ground vibration induced by traveling train with taking same vibration measurements both inside and outside of TSP (where no ground vibration mitigation devices are installed) at the discrete points lying on the straight line perpendicular to the THSR alignment at the distance 0m, 100m, 200m, 400m and 600m from the THSR-alignment centerline and contrast the effectiveness of the constructed HVMS. (2) Screw bolts mechanics measurement of Frictional Connection Block (FCB) : FCB is a part of HVMS’s design, which is used to connect the other part of HVMS, Foundation Stiffening Block (FSB) with the viaduct pile caps by frictional force.The frictional force is in relation with the axial force induced by screw bolts. Mechanic characteristics measurement is taken to confirm the capability of HVMS.摘要 ABSTRACT 目錄 IV 1.1 研究動機與目的 1 1.2 文獻回顧 3 1.3 本文內容 5 第2章 台南科學園區減振工程之振動監測 6 2.1高速列車行經高架橋衝擊大地之震波傳遞現象 6 2.2 複合減振系統 7 2.2.1 台南科學園區減振工程之設置 7 2.2.2 HVMS 設計概念 9 2.2.3 HVMS結構數值模擬分析 11 2.3倍頻頻譜 14 2.3環境振動頻譜的分析 14 2.4列車振動影響時段 17 第3章 量測系統 20 3.1振動監測 20 3.1.1 監測位置 20 3.1.2 硬體規格 21 3.1.3 量測方法： 23 3.2固鎖監測 27 3.2.1監測位置 27 3.2.2 硬體規格 32 3.3 量測程式 35 第4章 量測結果討論 38 4.1 振動量測結果 38 4.1.1量測資料編號說明 38 4.1.2 列車通過引起大地振動量測結果討論 55 4.2 螺栓固鎖量測結果 59 4.2.1量測資料編號說明 59 4.2.2量測結果 62 4.2.3螺栓固鎖量測結果討論 93 第5章 結論與未來展望 96 5.1 本文總結 96 5.2 未來展望 98 參考文獻 9