極高壓力振幅驅動器之設計 (3/3)

三年計劃總目的為設計及製造驅動器，應用於微流體流動所需要之幫浦。本報告說明第三 年計劃之進度。第二年在於驅動器之設計與初步製造。第三年重點在於製造之改善與測試。設 計以斜坡薄膜上下振動驅動流體在微管中流動，並不需要nozzle 或diffuser。驅動器為斜薄膜 氣動式微幫浦，主要是利用一個往復式、可調控頻率的氣壓，施力在斜薄膜結構，產生不對稱 的變形，而達到幫浦的目的。微流道尺寸為856μm 寬，60μm 高，斜薄膜角度有2、4、6、8、 10 度。製造使用PDMS 製程，以soft lithography 方法，快速及方便製造驅動器。由實驗結果 得知，頻率越高，流率會越大，經過25Hz 之後，頻率越高，流率越低;斜薄膜角度越大，流 率越小;微氣閥寬度到當三倍流道寬時，最大流體流率有473.5nl/sec。The overall goal of the three-year effort is to design and fabricate a novel device for pumping for microfluidics applications. This report outlines work done on the third year. The second year effort is on design and preliminary fabrication. The third year is on improvement of fabrication and testing of the device. The design is based on a slanted membrane oscillating periodically in a microchannel, which does not require a nozzle or a diffuser. The dimension of the microchannel is 856μm width, 60μm height, with slanted angle tested of 2, 4, 6, 8, 10 degrees. The fabrication of the device is based on soft lithographic technique using PDMS. Result shows that the pumping flow rate increases with increasing frequency up to 25Hz, then the flow rate would decrease. The maximum flow rate obtained is 473.5nl/sec