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Preparation of AIN Thin Films by Reactive Ion Beam Sputtering and The Optical Properties

土屋竜二
細田隆広
中川靖夫
大谷文雄
谷治環

Publication date

September 2007

Publisher

社団法人照明学会

Abstract

rights: 社団法人照明学会rights: 本文データは学協会の許諾に基づきCiNiiから複製したものであるrelation: isVersionOf: http://ci.nii.ac.jp/naid/110004587052

Extracted data

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rights: 社団法人照明学会 rights: 本文データは学協会の許諾に基づきCiNiiから複製したものである relation: isVersionOf: http://ci.nii.ac.jp...

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SIGLEAvailable from British Library Document Supply Centre- DSC:DXN002172 / BLDSC - British Library ...

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Kevin Kiedrowski
Marco Jupé
Detlev Ristau

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Goncić, Bratislav
Popovic, N
Bogdanov, Žarko
Zec, Slavica
Zlatanovic, M

January 2003

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Development of an ion-beam sputtering system for depositing thin films and multilayers of alloys and compounds

Gupta, Mukul
Gupta, Ajay
Phase, D. M.
Chaudhari, S. M.
Dasannacharya, B. A.

January 2003

An ion-beam sputtering (IBS) system has been designed and developed for preparing thin films and mul...

Development of the process of ion beam sputtering of the ITO thin films

Hlubuček, Jiří

January 2016

This report deals with ITO (indium tin oxide) deposition by ion-beam sputtering, and was custom-made...

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Гранько, С. В.
Емельянов, В. А.
Кисель, А. М.
Леонтьев, А. В.
Медведева, А. В.
Плебанович, В. И.

January 2003

Представлены результаты исследования влияния ионного облучения на физико-химические свойства термиче...