Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies

To accurately obtain the phase distribution of an optical surface under test, the accurate phase extraction algorithm is essential. To overcome the phase shift error, a random two-step phase shifting algorithm, which can be used in the fluctuating and non-uniform background intensity and modulation amplitude, Lissajous ellipse fitting, and least squares iterative phase shifting algorithm (LEF&LSI PSA), is proposed; pre-filtering interferograms are not necessary, but they can get relatively accurate phase distribution and unknown phase shift value. The simulation and experiment verify the correctness and feasibility of the LEF & LSI PSA. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.National Natural Science Foundation of China (NSFC) [11304034]; Program of China Scholarship Council [201508220104]; Program of Jilin Provincial Educational Department [2015241]; State Key Laboratory of Applied Optics; Doctoral Research Foundation of Northeast Electric Power University [BSJXM-201218]; Scientific Basic Research Foundation of Northeast Electric Power UniversityOpen access journal.This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu