Geometrical error calibration in reflective surface testing based on reverse Hartmann test

In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of sub-nanometer is achieved.Zhejiang Provincial Natural Science Foundation of China [LY17E050014]; National Natural Science Foundation of China (NSFC) [51375467, 11404312, 51476154, 51404223]; Zhejiang Key Discipline of Instrument Science and Technology [JL150508]This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu