Novel reduced-size micromachined resonators and filters

With an always-increasing need for higher integration, the wireless industry poses challenges regarding miniaturization and high performance circuitry. In addition, the solutions require compatibility with the rest of the design for integration and manufacturing. The present work depicts the progress toward a novel, high quality, one-pole filter-resonator operating in the 5.6-5.8 GHz range. Quality factors up to 640 are demonstrated on Silicon planar structures with volume of 177 mm³. Further size reduction yielded a volume of 24.5 mm³ and a quality factor of 186