This dissertation investigated two different types of semiconductor heterostructures grown by molecular beam epitaxy. The first were erbium-doped GaAs/AlGaAs quantum well structures with concentrations of Er in the range of 10¹⁷-2 x 10¹⁹ cm⁻³. Photoluminescence (PL) of Er³⁺ ions and Er-induced defects were studied at liquid helium and higher temperatures. A strong diffusion of erbium and interdiffusion of gallium and aluminum ions were observed at the boundary of the GaAs/AlGaAs quantum wells which led, at high erbium concentrations, to the degradation of the quantum wells and macroscopic (average) leveling of the erbium and aluminum concentrations over the whole semiconductor structure. From high-resolution PL spectra the existence of thre...