Investigations of Optics in the 10-500 Wavelength Size Regime

This dissertation investigates challenges associated with optics in the 10-500 wavelength size regime. For the visible spectrum, this size range (5-250um) is classified as micro-optics, but is set apart from other size ranges by a noticeable lack of suitable simulation and metrology tools. Optics of this size are gaining popularity in applications such as solid immersion lenses (SIL) and laser beam shaping, but require more research into simulation, testing, fabrication, and assembly in order to be easily integrated into commercial applications.A survey of previous work on SILs and micro-optics simulation/testing is given, including past work with gallium phosphide (GaP) microlenses. A new SIL aberration treatment is described using spherical-parent 3rd order aberrations. Agreement is shown with previous work, and the lack of hemisphere approximations gives a broader understanding of aberrations for varying SIL thicknesses. Results show that aberration reduces with lens radius, but thickness tolerances become tighter as dimensions shrink. A study of GaP intrinsic birefringence and the theoretical impact on the induced polarization signal is also given.A survey of beam propagation simulators is given and a sequential piece-wise diffraction (SPWD) simulator is developed for arbitrary optical systems that overcomes the difficulties of simulation in the 10-500 wavelength size regime. A discussion of a future extension to the work to determine reflected and transmitted field amplitudes with a non-sequential method is presented with specific discussion on the challenges of electric field surface transfer.The design and operation of a micro-interferometer is discussed and testing results from the first sub-100um diameter GaP SILs are shown. A novel method for determining the shape profile of aspheric surfaces using information from annular fringes is presented. Theoretical beam shaping applications for micro GaP lenses is also discussed with results using the SPWD method. Experimental results are also shown for a 1x1x0.3mm beam shaper package that images a laser diode beam to an approximate size of 60um at a working distance of 4mm.Finally, designs and experimental results are shown for the integration of GaP micro-optics into conventional systems as SILs or beam-shaping elements including methods and equipment for lapping and polishing GaP