Anomalous Auger electron spectroscopy results of chemical vapor deposited diamond (111) and (100) surfaces

High resolution Auger electron spectroscopy was performed on (111) and (100) facets as well as on a microvoid of polycrystalline diamond films. Auger fine structure analyses of these facets indicate anomalous line shapes when electron beam was focused to about 0.2 mu m diameter in contrast to the large area scans (beam size similar to 10 x 8 mu m) which exhibit a typical Auger pattern characteristic of diamond. This unusual behavior is discussed in terms of surface reconstruction which may occur due to Auger assisted desorption of hydrogen