Application of MEMS enabled excitation and detection schemes to photoacoustic imaging
- Kusch, Jonas
- Flockhart, Gordon
- Bauer, Ralf
- Uttamchandani, Deepak
Publication date
August 2019
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection
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