Low-temperature NH<sub>3</sub>-free silicon nitride platforms for integrated photonics
- Domínguez Bucio, T.
- Scholl, S.L.
- Ilie, S.T.
- Lacava, C.
- Debnath, K.
- Khokhar, A.Z.
- Banakar, M.
- Sotto, M.
- Grabska, K.M.
- Clementi, M.
- Bajoni, D.
- Galli, M.
- Saito, S.
- Petropoulos, P.
- Gardes, F.Y.
Publication date
October 2018
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
We demonstrate 3 platforms based on silicon nitride layers processed at 350°C and tailored to have different refractive indices. With these platforms, we have successfully fabricated low loss waveguides at telecom wavelengths, temperature tolerant (de)multiplexing devices, nonlinear waveguides, photonic crystal cavities and waveguides
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