The properties of tungsten nitride thin films deposited by both reactive RF-magnetron sputtering from tungsten targets in Argon/N-2, and RF generated nitrogen ions bombardment of previously sequentially deposited tungsten layers have been investigated. Films exhibited smaller erosion than pure tungsten in Argon plasmas at NANO-PSI expanding thermal plasma device
The structure, hardness, friction and wear of tungsten nitrides prepared by d.c. reactive magnetron ...
Developing high-performance tungsten plasma-facing materials for fusion reactors is an urgent task. ...
The erosion of W coatings with different content of C in Ar and reactive Ar + H2 plasmas under negat...
The properties of tungsten nitride thin films deposited by both reactive RF-magnetron sputtering fro...
The set of experiments using a glow discharge of direct current in the mixture of working gases (nit...
The W films on stainless steel substrate were grown using magnetron sputter deposition. After the de...
Thick tungsten nitride films have been deposited on GaAs substrates using a reactive rf-sputtering s...
Tungsten nitride thin films are synthesized by plasma enhanced chemical vapor deposition using a hot...
Nitrogen is foreseen as seeding species in future magnetic confinement fusion reactors in order to r...
Tungsten-silicon-nitrogen, W-Si-N, ternary thin films have been reactively sputter deposited from W5...
Tungsten nitride films were deposited by RF reactive magnetron sputtering using Tungsten target. The...
In this work, we present a study of the plasma evolution during tungsten carbon nitride (WCN) coatin...
SummaryTungsten nitride films were deposited by RF reactive magnetron sputtering using Tungsten targ...
Tungsten-silicon-nitrogen, W-Si-N, ternary thin films have been reactively sputter deposited from W5...
Nitrogen puffing is routinely applied in nuclear fusion plasma experiments with tungsten walls to co...
The structure, hardness, friction and wear of tungsten nitrides prepared by d.c. reactive magnetron ...
Developing high-performance tungsten plasma-facing materials for fusion reactors is an urgent task. ...
The erosion of W coatings with different content of C in Ar and reactive Ar + H2 plasmas under negat...
The properties of tungsten nitride thin films deposited by both reactive RF-magnetron sputtering fro...
The set of experiments using a glow discharge of direct current in the mixture of working gases (nit...
The W films on stainless steel substrate were grown using magnetron sputter deposition. After the de...
Thick tungsten nitride films have been deposited on GaAs substrates using a reactive rf-sputtering s...
Tungsten nitride thin films are synthesized by plasma enhanced chemical vapor deposition using a hot...
Nitrogen is foreseen as seeding species in future magnetic confinement fusion reactors in order to r...
Tungsten-silicon-nitrogen, W-Si-N, ternary thin films have been reactively sputter deposited from W5...
Tungsten nitride films were deposited by RF reactive magnetron sputtering using Tungsten target. The...
In this work, we present a study of the plasma evolution during tungsten carbon nitride (WCN) coatin...
SummaryTungsten nitride films were deposited by RF reactive magnetron sputtering using Tungsten targ...
Tungsten-silicon-nitrogen, W-Si-N, ternary thin films have been reactively sputter deposited from W5...
Nitrogen puffing is routinely applied in nuclear fusion plasma experiments with tungsten walls to co...
The structure, hardness, friction and wear of tungsten nitrides prepared by d.c. reactive magnetron ...
Developing high-performance tungsten plasma-facing materials for fusion reactors is an urgent task. ...
The erosion of W coatings with different content of C in Ar and reactive Ar + H2 plasmas under negat...