A simple MEMS technology for wafer-scale integration of short-wavelength tunable VCSELs is presented. Using a 3D model the half-symmetric cavity is optimized for singlemode emission from 10 μm large apertures over 12 nm tuning range
We present a micro electro-mechanical system (MEMS) tunable vertical-cavity surface-emitting laser (...
We report a tunable, single-mode vertical cavity surface-emitting laser (VCSEL) format suitable for ...
Data are presented demonstrating a new lithographic vertical-cavity surface-emitting laser (VCSEL) t...
A simple MEMS technology for wafer-scale integration of short-wavelength tunable VCSELs is presented...
A simple microelectromechanical systems technology for wafer-scale integration of tunable vertical-c...
A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-r...
A simple and low-cost technology for tunable vertical-cavity surface-emitting lasers (VCSELs) with c...
We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating...
We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emit...
Vertical-cavity surface-emitting lasers (VCSELs) have been considered as one of the promising candid...
The modulation bandwidth of micromachined tunable VCSELs is typically limited by the parasitic capac...
We demonstrate for the first time a surface micro-machined micro-electro-mechanical tunable VCSEL op...
We report an electrically pumped 1550 nm MEMS tunable VCSEL with a continuous tuning of 101 nm at 22...
For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tu...
We demonstrate how resonant excitation of a microelectromechanical system can be used to increase th...
We present a micro electro-mechanical system (MEMS) tunable vertical-cavity surface-emitting laser (...
We report a tunable, single-mode vertical cavity surface-emitting laser (VCSEL) format suitable for ...
Data are presented demonstrating a new lithographic vertical-cavity surface-emitting laser (VCSEL) t...
A simple MEMS technology for wafer-scale integration of short-wavelength tunable VCSELs is presented...
A simple microelectromechanical systems technology for wafer-scale integration of tunable vertical-c...
A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-r...
A simple and low-cost technology for tunable vertical-cavity surface-emitting lasers (VCSELs) with c...
We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating...
We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emit...
Vertical-cavity surface-emitting lasers (VCSELs) have been considered as one of the promising candid...
The modulation bandwidth of micromachined tunable VCSELs is typically limited by the parasitic capac...
We demonstrate for the first time a surface micro-machined micro-electro-mechanical tunable VCSEL op...
We report an electrically pumped 1550 nm MEMS tunable VCSEL with a continuous tuning of 101 nm at 22...
For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tu...
We demonstrate how resonant excitation of a microelectromechanical system can be used to increase th...
We present a micro electro-mechanical system (MEMS) tunable vertical-cavity surface-emitting laser (...
We report a tunable, single-mode vertical cavity surface-emitting laser (VCSEL) format suitable for ...
Data are presented demonstrating a new lithographic vertical-cavity surface-emitting laser (VCSEL) t...