Design, simulations and optimization of micromachined Golay-cell based THz sensors operating at room temperature

An innovative wideband micro-machined terahertz (THz)sensor operating at room temperature is presented. By means of 3D finite element method (FEM) simulations, the original design of M. Golay was miniaturized and modified by the introduction of a second absorbing membrane providing simultaneously an inherently integrated capacitive read-out. With a help of advanced multi-objective design tools, the sensor design was optimized in terms of linear dimensions, material’s electrical and mechanical properties. Feasibility of the final structure and its tolerance to parameters variation during the fabrication was assessed through a Monte-Carlo analysis. The optimized sensor promises a bandwidth of 3.5 THz (0.5-4THz)