An embedded 2D imager for microscale flowmetry based on optical feedback interferometry
- da Costa Moreira, Raul
- Quotb, Adam
- Tronche, Clément
- Jayat, Francis
- Luna Arriaga, Antonio
- Bosch, Thierry
- Perchoux, Julien
Publication date
October 2016
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
International audienceWe present a compact and embedded imager based on the Optical Feedback Interferometry (OFI) sensing scheme that gives quantitative information about the velocity in fluids at micro-scale through the Doppler-Fizeau effect. This sensor can reach a spatial imaging resolution up to 5 μm in 2D scanning using a MEMS 2 axis beam-steering mirror. As an illustration of the imager performances, a 500 μm circular channel flow profile is measured. An image (300x50 pixels) of a 100 μm square section channel is successfully obtained thus validating the device
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