This paper studies the nonlinear electromechanical response of a MEMS resonator numerically. A nonlinear continuous multi-physics model of the MEMS resonator is developed taking into account the effects of fringing field, size, residual axial load, and viscoelasticity. Moreover, both longitudinal and transverse motions are accounted for in the system modelling and simulations. The equations of motion of the MEMS resonator are obtained employing Hamilton's principle together with the modified version of the couple stress based theory (to account for size effects) and the Kelvin-Voigt model (to account for nonlinear energy dissipation). The Meijs-Fokkema electrostatic load formula is used to reliably model the fringing field effects. The cont...
The modelling of microelectromechanical systems provides a very challenging task in microsystems eng...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...
This study, for the first time, investigates the nonlinear bistable response of electrically actuate...
This study, for the first time, investigates the nonlinear bistable response of electrically actuate...
This study, for the first time, investigates the nonlinear bistable response of electrically actuate...
This paper investigates the static deflection as well as the nonlinear resonant behaviour of an elec...
This paper investigates the static deflection as well as the nonlinear resonant behaviour of an elec...
The present study investigates the nonlinear size-dependent behaviour of an electrically actuated ME...
The present study investigates the nonlinear size-dependent behaviour of an electrically actuated ME...
The present study investigates the nonlinear size-dependent behaviour of an electrically actuated ME...
Microbeams and microcantilevers are the main part of many MEMS. There are several body and contact f...
This paper is the first which examines the nonlinear dynamical characteristics of an imperfect micro...
Oscillating microplates attached to microbeams is the main part of many microresonators and micro-el...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...
The modelling of microelectromechanical systems provides a very challenging task in microsystems eng...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...
This study, for the first time, investigates the nonlinear bistable response of electrically actuate...
This study, for the first time, investigates the nonlinear bistable response of electrically actuate...
This study, for the first time, investigates the nonlinear bistable response of electrically actuate...
This paper investigates the static deflection as well as the nonlinear resonant behaviour of an elec...
This paper investigates the static deflection as well as the nonlinear resonant behaviour of an elec...
The present study investigates the nonlinear size-dependent behaviour of an electrically actuated ME...
The present study investigates the nonlinear size-dependent behaviour of an electrically actuated ME...
The present study investigates the nonlinear size-dependent behaviour of an electrically actuated ME...
Microbeams and microcantilevers are the main part of many MEMS. There are several body and contact f...
This paper is the first which examines the nonlinear dynamical characteristics of an imperfect micro...
Oscillating microplates attached to microbeams is the main part of many microresonators and micro-el...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...
The modelling of microelectromechanical systems provides a very challenging task in microsystems eng...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...
Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is attracting increasing int...