The invention relates to a device (100) with a pressure chamber (101) and a micropump (102) which is fluidically connected to the pressure chamber (101). The pressure chamber (101) has a gas-conducting region (103) and a liquid-conducting region (104). The micropump (102) is designed to generate a pneumatic pressure which is lower than a fluid pressure of a liquid (105) flowing through the liquid-conducting region (104) within the gas conducting region (103). According to the invention, a gas-permeable and liquid-impermeable separating element (106) at least partly separates the gas-conducting region (103) and the liquid-conducting region (104) from each other. According to the invention, the micropump (102) is arranged on the pressure cham...
By combination of the LIGA technique with techniques of membrane manufacture a micromembrane pump ha...
Miniaturized gas pumps are needed in many emerging environmental, health monitoring and homeland sec...
WO 200211880 A UPAB: 20020516 NOVELTY - Microreactor device (1) comprises at least one microreactor ...
The invention relates to a device (1) comprising an opening (2) which defines a fluidic connection b...
DE 102008004147 A1 UPAB: 20090728 NOVELTY - The micropump (1) has a diaphragm (2), which is extended...
A micro-pump pumps either electrically conductive or non-conductive liquids through channels of the ...
WO2004018103 A UPAB: 20040324 NOVELTY - A pipetting device comprises a micropump (200), and a pipett...
DE 10238600 A UPAB: 20040405 NOVELTY - The device has three membrane regions with piezoactuators for...
A micropump includes: a pumping chamber (20), between a first semiconductor substrate (7) and a seco...
The description refers to a setup for plasma generation as presented in the German patent applicatio...
The invention relates to a valve arrangement, in particular for use in pneumatic controls. Since pne...
DE 102009048607 A1 UPAB: 20110425 NOVELTY - The sealing allows a chamber (1) to be formed in a housi...
WO2004002884 A UPAB: 20040218 NOVELTY - Membrane separation process comprises compressing the gas st...
This invention relates to apparatus for producing gases and is in the nature of an improvement upon ...
A microminiaturizable valve comprises a pressure equalizing chamber, a first semi-active valve which...
By combination of the LIGA technique with techniques of membrane manufacture a micromembrane pump ha...
Miniaturized gas pumps are needed in many emerging environmental, health monitoring and homeland sec...
WO 200211880 A UPAB: 20020516 NOVELTY - Microreactor device (1) comprises at least one microreactor ...
The invention relates to a device (1) comprising an opening (2) which defines a fluidic connection b...
DE 102008004147 A1 UPAB: 20090728 NOVELTY - The micropump (1) has a diaphragm (2), which is extended...
A micro-pump pumps either electrically conductive or non-conductive liquids through channels of the ...
WO2004018103 A UPAB: 20040324 NOVELTY - A pipetting device comprises a micropump (200), and a pipett...
DE 10238600 A UPAB: 20040405 NOVELTY - The device has three membrane regions with piezoactuators for...
A micropump includes: a pumping chamber (20), between a first semiconductor substrate (7) and a seco...
The description refers to a setup for plasma generation as presented in the German patent applicatio...
The invention relates to a valve arrangement, in particular for use in pneumatic controls. Since pne...
DE 102009048607 A1 UPAB: 20110425 NOVELTY - The sealing allows a chamber (1) to be formed in a housi...
WO2004002884 A UPAB: 20040218 NOVELTY - Membrane separation process comprises compressing the gas st...
This invention relates to apparatus for producing gases and is in the nature of an improvement upon ...
A microminiaturizable valve comprises a pressure equalizing chamber, a first semi-active valve which...
By combination of the LIGA technique with techniques of membrane manufacture a micromembrane pump ha...
Miniaturized gas pumps are needed in many emerging environmental, health monitoring and homeland sec...
WO 200211880 A UPAB: 20020516 NOVELTY - Microreactor device (1) comprises at least one microreactor ...