In this paper we present the concept of a compact intelligent industrial pressure transmitter developed at the Center of Microelectronic Technologies (CMT), and discuss some of the most important steps in its design process. First the constraints of the design are defined, and then the decisions are made in order to fulfill the design objectives in an optimal way, which is made possible by using the latest available technology. Especially important for this design are mixed signal circuits, and the focus is on the digital-to-analog circuitry that generates the transmitter's analog output signal. Several solutions are considered and compared, and the chosen one is further investigated, including the experimental characterization of the outpu...
The topic of this thesis is devoted to the use of various solutions for electrical circuits of press...
High sensitive (S = 11.2 ± 1.8 mV/V/kPa with nonlinearity error 2KNL = 0.15 ± 0.09%/FS) small-sized ...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
In this paper we first describe the latest silicon piezoresistive MEMS pressure sensor developed and...
An overview is given of industrial measurement instruments (transmitters) of pressure and other proc...
In the framework of developing innovative microfabricated pressure sensors, we present here three de...
MEMS pressure sensors are tiny systems fabricated with technologies inherited from integrated circui...
The Industrial Internet of Things (IIoT) and Industry 4.0 require new intelligent sensor designs wit...
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applic...
Of all micro sensors the silicon pressure sensors have the largest market potential. It will remain ...
This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure senso...
High sensitivity MEMS pressure sensor chip for different ranges (1 to 60 kPa) utilizing the novel el...
The article translated from Russian to English on pp. 691-693 (please, look down). The paper summari...
Characteristics of high sensitivity MEMS pressure sensor chip for 10 kPa utilizing a novel electrica...
In this paper we present a high-performance, simple and low-cost method for simultaneous measurement...
The topic of this thesis is devoted to the use of various solutions for electrical circuits of press...
High sensitive (S = 11.2 ± 1.8 mV/V/kPa with nonlinearity error 2KNL = 0.15 ± 0.09%/FS) small-sized ...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
In this paper we first describe the latest silicon piezoresistive MEMS pressure sensor developed and...
An overview is given of industrial measurement instruments (transmitters) of pressure and other proc...
In the framework of developing innovative microfabricated pressure sensors, we present here three de...
MEMS pressure sensors are tiny systems fabricated with technologies inherited from integrated circui...
The Industrial Internet of Things (IIoT) and Industry 4.0 require new intelligent sensor designs wit...
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applic...
Of all micro sensors the silicon pressure sensors have the largest market potential. It will remain ...
This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure senso...
High sensitivity MEMS pressure sensor chip for different ranges (1 to 60 kPa) utilizing the novel el...
The article translated from Russian to English on pp. 691-693 (please, look down). The paper summari...
Characteristics of high sensitivity MEMS pressure sensor chip for 10 kPa utilizing a novel electrica...
In this paper we present a high-performance, simple and low-cost method for simultaneous measurement...
The topic of this thesis is devoted to the use of various solutions for electrical circuits of press...
High sensitive (S = 11.2 ± 1.8 mV/V/kPa with nonlinearity error 2KNL = 0.15 ± 0.09%/FS) small-sized ...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...