Manufacturing equipment and scientific instruments, including wafer scanners, printers, microscopes, and medical imaging scanners, require accurate and fast motions. Increasing requirements necessitate enhanced control performance. The aim of this paper is to identify several challenges for advanced motion control originating from these increasing accu- racy, speed, and cost requirements. For instance, flexible mechanics must be explicitly addressed through overactuation, oversensing, inferential control, and position-dependent control. This in turn requires suitable models of appropriate complexity, which are identified and learned from inexpensive experimental data. Several ongoing developments are outlined that constitute a part of an ov...
In high-performance motion systems, e.g. wafer-stages and pick-and-place machines, there is an incre...
Machine learning techniques, including Gaussian processes (GPs), are expected to play a significant ...
Increasingly stringent performance requirements for motion control necessitate the use of increasing...
Manufacturing equipment and scientific instruments, including wafer scanners, printers, microscopes,...
Manufacturing equipment and scientific instruments, including wafer scanners, printers, microscopes,...
Motion systems are a key enabling technology in manufacturing machines and scientific instruments. I...
© 2007-2011 IEEE. Motion-control technologies are at the core of multiple mechatronic products and a...
In high-performance motion systems, e.g. waferstages or pick-and-place machines, there is an increas...
In high-performance motion systems, e.g. waferstages or pick-and-place machines, there is an increas...
Modern machines strive to run at limit performance and dependability while their operational area an...
Advanced motion systems like pick-and-place machines used in the semiconductor industry challenge th...
Work during the recording period proceeded along the lines of the proposal, i.e., three aspects of h...
Many promising robotics research results were obtained during the late 1970s and early 1980s. Some e...
In high-performance motion systems, e.g. wafer-stages and pick-and-place machines, there is an incre...
Machine learning techniques, including Gaussian processes (GPs), are expected to play a significant ...
Increasingly stringent performance requirements for motion control necessitate the use of increasing...
Manufacturing equipment and scientific instruments, including wafer scanners, printers, microscopes,...
Manufacturing equipment and scientific instruments, including wafer scanners, printers, microscopes,...
Motion systems are a key enabling technology in manufacturing machines and scientific instruments. I...
© 2007-2011 IEEE. Motion-control technologies are at the core of multiple mechatronic products and a...
In high-performance motion systems, e.g. waferstages or pick-and-place machines, there is an increas...
In high-performance motion systems, e.g. waferstages or pick-and-place machines, there is an increas...
Modern machines strive to run at limit performance and dependability while their operational area an...
Advanced motion systems like pick-and-place machines used in the semiconductor industry challenge th...
Work during the recording period proceeded along the lines of the proposal, i.e., three aspects of h...
Many promising robotics research results were obtained during the late 1970s and early 1980s. Some e...
In high-performance motion systems, e.g. wafer-stages and pick-and-place machines, there is an incre...
Machine learning techniques, including Gaussian processes (GPs), are expected to play a significant ...
Increasingly stringent performance requirements for motion control necessitate the use of increasing...