Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors
- Kusch, Jonas
- Flockhart, Gordon M.H.
- Bauer, Ralf
- Uttamchandani, Deepak
Publication date
December 2018
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high pulse repetition rate MEMS Q-switched Nd:YAG laser
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