Liquid crystal polymer composite films for reconfigurable photomasking applications

Applied Physics Letters. 91, pp: 141119.We show proof of concept of a real-time reconfigurable photomask fabricated from holographically formed polymer-dispersed liquid crystal !H-PDLC" reflection gratings on etched indium tin oxide patterned electrodes. H-PDLC films were formed using a thiolene based polymer to have a reflection wavelength that modulates 440 nm, the peak sensitivity wavelength of Shipley 1800 series positive photoresist. A working prototype of this adaptable photomask device is shown by comparing patterns formed using the H-PDLC mask and similar patterns formed using a static contact photomask showing that H-PDLC films have the ability to modulate 440 nm light and control the exposure dose of photoresist