Add to ORKGWe report a high resolution wavelength and displacement sensor based on an electromechanically tuneable photonic crystal cavity, where sensing, actuation and electrical readout are integrated together in the same device
We report a novel, fully-integrated nanophotonic wavelength and displacement sensor based on an elec...
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a do...
Miniaturization of displacement sensors for nanoscale metrology is a key requirement in many applica...
We report a high resolution wavelength and displacement sensor based on an electromechanically tunea...
Displacement sensing at the nanoscale is required in many applications, including accelerometry, mas...
We report a nanophotonic sensor where the key functionalities of actuation, sensing and read-out are...
We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane ...
We report a novel, fully-integrated nanophotonic wavelength and displacement sensor based on an elec...
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a do...
Miniaturization of displacement sensors for nanoscale metrology is a key requirement in many applica...
We report a high resolution wavelength and displacement sensor based on an electromechanically tunea...
Displacement sensing at the nanoscale is required in many applications, including accelerometry, mas...
We report a nanophotonic sensor where the key functionalities of actuation, sensing and read-out are...
We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane ...
We report a novel, fully-integrated nanophotonic wavelength and displacement sensor based on an elec...
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a do...
Miniaturization of displacement sensors for nanoscale metrology is a key requirement in many applica...