Comparative calibration of laser interferometers

V magistrskem delu je predstavljeno primerjalno umerjanje laserskih interferometrov. Izdelan je bil koncept postopka in ovrednotena merilna negotovost na osnovi eksperimenta. Eksperimentalno delo je bilo izvedeno v Laboratoriju za tehnološke meritve (LTM) na Fakulteti za strojništvo v Mariboru z namenom kasnejše izdelave dokumentacije za umerjanje laserskih interferometrov. Eksperimenti so bili izvedeni s pomočjo referenčnega laserskega interferometra, ki ga imamo v laboratoriju, ter z dvema industrijskima testnima laserskima interferometroma. Ugotovljeno je bilo, da v laboratoriju dosegamo ustrezne pogoje za izvedbo meritev, potrebno pa je biti pazljiv pri sami postavitvi laserjev, saj orientacija laserjev povzroča ključne pogreške pri umerjanju. Prav tako je potrebno izbrati pravilno metodo primerjave, saj lahko tudi ta bistveno vpliva na rezultat umerjanja.The master\u27s thesis presents comparative calibration of laser interferometers. The concept of a procedure and evaluation of measurement uncertainty was created based on an experiment. The experiment was made in the Laboratory for production measurement (LTM) at the Faculty of Mechanical Engineering for the purpose of preparing documentation for calibrating laser interferometers. The experiments were made by using a reference laser interferometer owned by the laboratory, and with two industrial test laser interferometers. It was discovered, that we have proper conditions for performing measurements in our laboratory, but we have to be careful with laser layout, due to different errors. We also have to choose appropriate comparison method, because it can affect the results of calibration