The invention relates to a device (1) comprising an opening (2) which defines a fluidic connection between a fluid channel (3) in the device (1) and surrounding air, a sensor (4) which is coupled to the fluid channel (3) and which is designed to detect at least one component of the surrounding air, and a microfluidic actuator (5) which is connected downstream of the sensor (4) and is designed to suction fluid through the fluid channel (3) during a suction stroke, pump the fluid in the direction of the sensor (4), and pump the suctioned fluid back in the direction of the opening (2) through the fluid channel (3) during a pressure stroke. According to the invention, the sensor (4) is arranged at a distance from the opening (2), and the volume...
MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspend...
DE 102008004139 B3 UPAB: 20090619 NOVELTY - The device (100) has a pressure difference forming devic...
A microfluidic device is provided, the microfluidic device comprising: a plurality of chambers (3, 4...
The invention relates to a sensor for detecting a liquid in a fluid channel (14) of a microfluidic c...
The invention relates to a device (100) with a pressure chamber (101) and a micropump (102) which is...
DE 102008004147 A1 UPAB: 20090728 NOVELTY - The micropump (1) has a diaphragm (2), which is extended...
Microfluidic module for analysis of fluids, comprises: an integral carrier substrate (101) with a fi...
A micro-valve (50a,50b) controls a fluid flow and consists of a valve flap (52) operated by electro-...
The micromembrane pump has a pump membrane (110). This is moved by a drive device (100) into a first...
We present the results on the design, fabrication, and performance of a gas-actuated micro-jet pump ...
The system has a passage opening (12) formed in the first main surface of the substrate (10), with a...
DE 102007018752 A1 UPAB: 20081118 NOVELTY - The device has a substrate (120), a duct (130) formed in...
We present the results on the design, simulation, fabrication, and characterization of a gas-actuate...
DE 10238600 A UPAB: 20040405 NOVELTY - The device has three membrane regions with piezoactuators for...
Abstract ⎯ MEMS fluidic devices often require the integration of sensor/actuator structures with fre...
MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspend...
DE 102008004139 B3 UPAB: 20090619 NOVELTY - The device (100) has a pressure difference forming devic...
A microfluidic device is provided, the microfluidic device comprising: a plurality of chambers (3, 4...
The invention relates to a sensor for detecting a liquid in a fluid channel (14) of a microfluidic c...
The invention relates to a device (100) with a pressure chamber (101) and a micropump (102) which is...
DE 102008004147 A1 UPAB: 20090728 NOVELTY - The micropump (1) has a diaphragm (2), which is extended...
Microfluidic module for analysis of fluids, comprises: an integral carrier substrate (101) with a fi...
A micro-valve (50a,50b) controls a fluid flow and consists of a valve flap (52) operated by electro-...
The micromembrane pump has a pump membrane (110). This is moved by a drive device (100) into a first...
We present the results on the design, fabrication, and performance of a gas-actuated micro-jet pump ...
The system has a passage opening (12) formed in the first main surface of the substrate (10), with a...
DE 102007018752 A1 UPAB: 20081118 NOVELTY - The device has a substrate (120), a duct (130) formed in...
We present the results on the design, simulation, fabrication, and characterization of a gas-actuate...
DE 10238600 A UPAB: 20040405 NOVELTY - The device has three membrane regions with piezoactuators for...
Abstract ⎯ MEMS fluidic devices often require the integration of sensor/actuator structures with fre...
MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspend...
DE 102008004139 B3 UPAB: 20090619 NOVELTY - The device (100) has a pressure difference forming devic...
A microfluidic device is provided, the microfluidic device comprising: a plurality of chambers (3, 4...