Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
In this article, a spectroscopic ellipsometer is constructed in rotating polarizer and analyzer conf...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
A substantially self-contained on-board material system investigation system for effecting relativ...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsom...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
In this article, a spectroscopic ellipsometer is constructed in rotating polarizer and analyzer conf...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
A substantially self-contained on-board material system investigation system for effecting relativ...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsom...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
In this article, a spectroscopic ellipsometer is constructed in rotating polarizer and analyzer conf...