A force sensor with five degrees of freedom using optical intensity modulation for usage in a magnetic resonance field

In this paper, a precise small 5-DOF (degree of freedom) force sensor is proposed for use in a strong EMF (electromagnetic field) environment. Detecting modules using CFPs (carbon fiber plates) and transducing modules using the optical modulation principle are adopted in order not to be affected by the EMF. For miniaturization of the multi-DOF force sensor, a 2-DOF transducing module using a spherical mirror and a 3-DOF transducing module using a plane mirror were designed and integrated. The design parameters of highly sensitive transducing modules were investigated and determined experimentally. To combine with these transducing modules, a 2-DOF detecting module using CFP single leaf springs and a 3-DOF detecting module using a CFP tripod spring were also designed. Considering the easy calibration process and convenient design change, the elastic detecting modules were designed so that they deform independently according to each input force component. A calibration test confirmed that the detecting modules deform linearly and independently of the input force. The results of the evaluation tests showed that the range and resolution of forces were +/- 4 N and 0.94-7.1 mN and the range and resolution of moments were +/- 120 N mm and 0.023-0.034 N mm, respectively. The high sensitivity and the linearity of the measuring results were also verified