Water Vapor Permeation Properties of Al2O3/TiO2 Passivation Layer Deposited by Atomic Layer Deposition

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Publication date

October 2010

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Journal

Applied Science and Convergence Technology

Abstract

�� (ALD: atomic layer deposition)�� PES (poly (ether sulfon)) �� , �� Al2O3�� TiO2 �� . �� Al2O3�� TiO2 �� , �� , �� . �� PES �� buffer layer�� , �� . �� MOCON test�� . �� ...

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Water Vapor Permeation Properties of Al2O3/TiO2 Passivation Layer Deposited by Atomic Layer Deposition

Abstract

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Water Vapor Permeation Properties of Al2O3/TiO2 Passivation Layer Deposited by Atomic Layer Deposition

Abstract

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