Micromachined Si cantilever arrays for parallel AFM operation

Silicon cantilever arrays with a very small pitch for parallel AFM operations were studied. We fabricated 1x104 in eight groups and 1x30 Si probe arrays and produced a smaller pitch (15 mu m) between probe tips by using Si anisotropic etching with a vertical wall shaped oxide mask. The vertical controls of Si probes were able to operate individually or in a group by integrating electrostatic actuators into the cantilevers of the probes. The fabricated Si cantilever arrays showed reasonable dynamic characteristics for the probe cantilever and reliable parallel operation of AFM