Add to ORKGA spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber
A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector me...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
A substantially self-contained on-board material system investigation system for effecting relativ...
Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a...
The present invention relates to ellipsometer and polarimeter systems, and more particularly is an e...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
A substantially self-contained “on-boar ” material system investigation system functionally mounted ...
A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector me...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
A substantially self-contained on-board material system investigation system for effecting relativ...
Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a...
The present invention relates to ellipsometer and polarimeter systems, and more particularly is an e...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
A substantially self-contained “on-boar ” material system investigation system functionally mounted ...
A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector me...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...