Add to ORKGAn ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a stationary compensator, positioned between an analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The use of a light fiber to carry light from a source thereof, to a polarization state generator, is also disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA ...
An apparatus and method for the measurement of at least one parameter of the state of polarization o...
A sample system investigation system, such as an ellipsometer or polarimeter system, for use in inve...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems...
Disclosed is a System and method for controlling polarization State determining parameters of a pola...
In an ellipsometer, a phase-modulated, polarized light beam is applied to a sample, electrical signa...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
A novel and very simple ellipsometer for the characterization of film-substrate systems that employs...
In an ellipsometer, a phase-modulated, polarized light beam is applied to a sample, electrical signa...
An apparatus and method for the measurement of at least one parameter of the state of polarization o...
A sample system investigation system, such as an ellipsometer or polarimeter system, for use in inve...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems...
Disclosed is a System and method for controlling polarization State determining parameters of a pola...
In an ellipsometer, a phase-modulated, polarized light beam is applied to a sample, electrical signa...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
A novel and very simple ellipsometer for the characterization of film-substrate systems that employs...
In an ellipsometer, a phase-modulated, polarized light beam is applied to a sample, electrical signa...
An apparatus and method for the measurement of at least one parameter of the state of polarization o...
A sample system investigation system, such as an ellipsometer or polarimeter system, for use in inve...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...