Fabrication of Superconducting MgB2 Thin Films by Magnetron co-Sputtering on (001) MgO Substrates

Fabretti S, Thomas P, Meinert M, Imort I-M, Thomas A. Fabrication of Superconducting MgB2 Thin Films by Magnetron co-Sputtering on (001) MgO Substrates. Journal Of Superconductivity And Novel Magnetism. 2013;26(5):1879-1882.We fabricated superconducting MgB2 thin films on (001) MgO substrates by magnetron rf and dc co-sputtering on heated substrates. We annealed the samples exsitu and in-situ at temperatures between 450 degrees C and 750 degrees C. The substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB2 superconducting thin films. We achieved a critical onset temperature of up to 27.1 K for the ex-situ and 25.6 K for the in-situ annealed samples at a film thickness of 30 nm. The samples shows an out of plane (0002)-Peak which was determined by x-ray diffraction