International audienceInfrared femtosecond laser induced damage has been studied in order to determine, with analytical protocols, the processes involved in laser ablation in this regime. Transmission Electron Microscopy (TEM) coupled with Focused Ion Beam (FIB) milled cross-sections of natural ablated monazite were used. Craters were formed using N = 1 and 3 shots, E0 = 0.1 and 0.8 mJ per pulse and τ = 60 fs. Observations revealed that laser settings induce little changes in the nature and size of damaged structures. The crater bottom forms a ∼0.5 μm layer composed of melted and recrystallized monazite grains, and spherical ∼10 nm voids. The underlying sample shows lattice distortions, progressively attenuated with depth, typical of mechan...