Experimental study of EUV mirror radiation damage resistance under long term free electron laser exposures below the single shot damage threshold
- Makhotkin, I.A.
- Sobierajski, R.
- Chalupsky, J.
- Tiedtke, K.
- de Vries, G.
- Störmer, M.
- Scholze, F.
- Siewert, F.
- van de Kruijs, R.W. E.
- Milov, I.
- Louis, E.
- Jacyna, I.
- Jurek, M.
- Klinger, D.
- Nittler, La.
- Syryanyy, Y.
- Juha, L.
- Hajkova, V.
- Vozda, V.
- Burian, T.
- Saksl, K.
- Faatz, B.
- Keitel, B.
- Plönjes, E.
- Schreiber, S.
- Toleikis, S.
- Loch, R.
- Hermann, M.
- Strobel, S.
- Nienhuys, H. K.
- Gwalt, G.
- Mey, T.
- Enkisch, H.
DOIAbstract
The durability of grazing and normal incidence optical coatings has been experimentally assessed under free electron laser irradiation at various numbers of pulses up to 16 million shots and various fluence levels below 10 of the single shot damage threshold. The experiment was performed at FLASH, the Free electron LASer in Hamburg, using 13.5 nm extreme UV EUV radiation with 100 fs pulse duration. Polycrystalline ruthenium and amorphous carbon 50 nm thin films on silicon substrates were tested at total external reflection angles of 20 and 10 grazing incidence, respectively. Mo Si periodical multilayer structures were tested in the Bragg reflection condition at 16 off normal angle of incidence. The exposed areas were analysed pos...
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