High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range
- Hosseini, Ehsan Shah
- Yegnanarayanan, Siva
- Atabaki, Amir Hossein
- Soltani, Mohammad
- Adibi, Ali
Publication date
August 2009
DOI Publisher
The Optical Society ISSN
1094-4087 Journal
Optics ExpressAbstract
© 2009 Optical Society of AmericaThe definitive version of this paper is available at: http://dx.doi.org/10.1364/OE.17.014543DOI: 10.1364/OE.17.014543High quality factor (Q≈3.4×10⁶) microdisk resonators are demonstrated in a Si3N4 on SiO₂ platform at 652–660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling
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