We present an analytical model that gives the values of squeeze film damping and spring coefficients for MEMS cantilever resonators taking into account the effect of flexural modes of the resonator. We use the exact mode shapes of a 2D cantilever plate to solve for pressure in the squeeze film and then derive the equivalent damping and spring coefficient relations from the back force calculations. The relations thus obtained can be used for any flexural mode of vibration of the resonators. We validate the analytical formulae by comparing the results with numerical simulations carried out using coupled finite element analysis in ANSYS, as well as experimentally measured values from MEMS cantilever resonators of various sizes vibrating in dif...
Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modifie...
Structural vibration studies of various MEMS structures have revealed that whenever a suspended flat...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
We present an analytical model that gives the values of squeeze film damping and spring coefficients...
Squeeze-film damping plays a significant role in the performance of micro-resonators because it det...
We report on the resonant frequency modulation of inertial microelectromechanical systems (MEMS) str...
Abstract Dynamic performance has long been critical for micro-electro-mechanical system (MEMS) devic...
Oscillating microplates attached to microbeams is the main part of many microresonators. There are s...
Closed-form expressions for the stiffness and the damping coefficients of a squeeze film are derived...
The air squeeze film damping effect on the dynamic responses of clamped micro- electromechanical res...
The functionality of atomic force microscopy (AFM) and nanomechanical sensing can be enhanced using ...
In this work, we address the issue of modeling squeeze film damping in nontrivial geometries that ar...
There are various energy dissipation mechanisms that affect the dynamic response of microstructures ...
Many MEMS devices employ parallel plates for capacitive sensing and actuation. The desire to get a s...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modifie...
Structural vibration studies of various MEMS structures have revealed that whenever a suspended flat...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
We present an analytical model that gives the values of squeeze film damping and spring coefficients...
Squeeze-film damping plays a significant role in the performance of micro-resonators because it det...
We report on the resonant frequency modulation of inertial microelectromechanical systems (MEMS) str...
Abstract Dynamic performance has long been critical for micro-electro-mechanical system (MEMS) devic...
Oscillating microplates attached to microbeams is the main part of many microresonators. There are s...
Closed-form expressions for the stiffness and the damping coefficients of a squeeze film are derived...
The air squeeze film damping effect on the dynamic responses of clamped micro- electromechanical res...
The functionality of atomic force microscopy (AFM) and nanomechanical sensing can be enhanced using ...
In this work, we address the issue of modeling squeeze film damping in nontrivial geometries that ar...
There are various energy dissipation mechanisms that affect the dynamic response of microstructures ...
Many MEMS devices employ parallel plates for capacitive sensing and actuation. The desire to get a s...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modifie...
Structural vibration studies of various MEMS structures have revealed that whenever a suspended flat...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...