Antiferroelectric thin films for MEMS applications

Antiferroelectric compositions have many potential applications in energy conversion and microelectromechanical systems. Electric field induced phase transitions between ferroelectric and antiferroelectric phases were studied in antiferroelectric lead zirconate and modified lead zirconate titanate stannate family thin films for various smart system applications. Thin films of various antiferroelectric thin film compositions such as $PbZrO_3$, Nb- and La-modified lead zirconate titanate stannate were processed by the pulsed excimer laser ablation technique. Dielectric, hysteresis, pyroelectric and switching properties were studied in detail for a new generation of functional materials. A comparative study of functional properties is presented with these antiferroelectric compositions in comparison with the conventional ferroelectric composition