Add to ORKGGuided wave Optics in combination with micro-machining technology offer immense potential for sensor appliations. In this paper we analyse an guided wave optics based MEMS pressure sensor consisting of a Mach-Zehnder interferomter whose sensing arm is over the edge of a bulk micromachined silicon diaphragm. We compare this sensor utilising the elasto-ptic effect with the conventional piezo-resistive and capactive miromachined pressure sensors in terms of their sensitivities. This MOEM pressure sensor is found to be superior to the convenional ones. This sensor can be used for blood pressure monitorng, precision instrumentation, aerospace propulsion application with suitable design parameters
Abstract — In this paper we propose and analyse novel optical MEMS based pressure and vibration sens...
A compact, mass producible Silicon On Insulator (SOI) based pressure sensor consisting of a folded M...
We experimentally investigated the relationship between sensitivity and diaphragm thickness in a gla...
Guided wave Optics in combination with micro-machining technology offer immense potential for sensor...
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator ...
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator ...
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator ...
This paper presents theoretical analysis of a silicon based micro-machined differential pressure sen...
This paper presents theoretical analysis of a silicon based micro-machined differential pressure sen...
Electronics and structures for MEMS 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's 2001 sym...
In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due...
In this paper we propose and analyse novel optical MEMS based pressure and vibration sensors utilisi...
In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due...
Abstract -This paper explains about an optical pressure sensor based on MEMS technology that measure...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
Abstract — In this paper we propose and analyse novel optical MEMS based pressure and vibration sens...
A compact, mass producible Silicon On Insulator (SOI) based pressure sensor consisting of a folded M...
We experimentally investigated the relationship between sensitivity and diaphragm thickness in a gla...
Guided wave Optics in combination with micro-machining technology offer immense potential for sensor...
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator ...
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator ...
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator ...
This paper presents theoretical analysis of a silicon based micro-machined differential pressure sen...
This paper presents theoretical analysis of a silicon based micro-machined differential pressure sen...
Electronics and structures for MEMS 2 : 17-19 December 2001 : Adelaide, Australia. : SPIE's 2001 sym...
In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due...
In this paper we propose and analyse novel optical MEMS based pressure and vibration sensors utilisi...
In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due...
Abstract -This paper explains about an optical pressure sensor based on MEMS technology that measure...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
Abstract — In this paper we propose and analyse novel optical MEMS based pressure and vibration sens...
A compact, mass producible Silicon On Insulator (SOI) based pressure sensor consisting of a folded M...
We experimentally investigated the relationship between sensitivity and diaphragm thickness in a gla...