For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality factors (Q). This paper considers ring resonator based rate sensors and investigates the influence of design changes to the ring and support legs on thermoelastic damping, which is the dominant dissipation mechanism. A computational method is used to quantify the thermoelastic damping and a detailed parameter study is conducted to understand the influence of ring geometry, support legs and micro-machined slots around the ring circumference. The results show that damping in the support legs can have significant influence on the total energy dissipated from the resonator, and the optimum leg geometry c...
MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their...
International audienceWe present new experimental data illustrating the importance of thermoelastic ...
The obtainable quality factor for a nano beam resonator is limited due to internal damping such as t...
Micro Electro-Mechanical Systems (MEMS) rate sensors are inertial devices based on a resonating stru...
The paper deals with finite element analysis of damped modal vibrations Q-factor values determined b...
ABSTRACT Maximizing quality (Q) factor is key to enhancing the performance of micro mechanical reson...
MEMS based low damping inertial resonators are the key element in the development of precision vibra...
The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonator...
Maximizing quality (Q) factor is key to enhancing the performance of micro mechanical resonators, wh...
Silicon Microelectromechanical (MEMS) resonators are being developed for a wide variety of applicati...
This paper reports a preliminary examination of the effect of anchor geometry design on the quality ...
AbstractMiniaturized resonators are critical components in many application fields such as sensing, ...
This dissertation investigates dissipation in microelectromechanical (MEMS) resonators via detailed ...
The work in this thesis aims to uncover energy loss mechanisms in MEMS-based piezoelectric contour-m...
High quality factor (Q-factor) is a crucial parameter for the development of precision inertial reso...
MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their...
International audienceWe present new experimental data illustrating the importance of thermoelastic ...
The obtainable quality factor for a nano beam resonator is limited due to internal damping such as t...
Micro Electro-Mechanical Systems (MEMS) rate sensors are inertial devices based on a resonating stru...
The paper deals with finite element analysis of damped modal vibrations Q-factor values determined b...
ABSTRACT Maximizing quality (Q) factor is key to enhancing the performance of micro mechanical reson...
MEMS based low damping inertial resonators are the key element in the development of precision vibra...
The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonator...
Maximizing quality (Q) factor is key to enhancing the performance of micro mechanical resonators, wh...
Silicon Microelectromechanical (MEMS) resonators are being developed for a wide variety of applicati...
This paper reports a preliminary examination of the effect of anchor geometry design on the quality ...
AbstractMiniaturized resonators are critical components in many application fields such as sensing, ...
This dissertation investigates dissipation in microelectromechanical (MEMS) resonators via detailed ...
The work in this thesis aims to uncover energy loss mechanisms in MEMS-based piezoelectric contour-m...
High quality factor (Q-factor) is a crucial parameter for the development of precision inertial reso...
MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their...
International audienceWe present new experimental data illustrating the importance of thermoelastic ...
The obtainable quality factor for a nano beam resonator is limited due to internal damping such as t...