A novel method to double the measurement range of wavelength scanning interferometry (WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign ambiguity, i.e. from an interference signal it is not possible to distinguish whether the OPD is positive or negative. The sign ambiguity can be resolved by measuring an interference signal in quadrature. A method to obtain a quadrature interference signal for WSI is described and a theoretical analysis of the advantages is reported. Simulations of the advantages of the technique and of signal errors due to non-ideal quadrature are discussed. The analysis and simulation are supported by experimental measurements to show the improved performances
The optical path difference (OPD) and amplitude of a sinusoidal wavelength scanning (SWS) are contro...
Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the ca...
The problems of combining ideas of phase shifting interferometry (PSI) and synthetic-wavelength tech...
A novel method to double the measurement range of wavelength scanning interferometry (WSI) is descri...
A method to obtain unambiguous surface height measurements using wavelength scanning interferometry ...
The mass production of high-precision components has created a demand for in-line inspection tools...
Wavelength scanning interferometry (WSI) is a technique for measuring surface topography that is cap...
Applications : Conference : Sep 1999, Pultusk, PolandTwo different sinusoidal wavelength-scanning (S...
The assessment of surface finish has become increasingly important in the field of precision enginee...
The uncertainty of measurements made on an areal surface topography instrument is directly influence...
AbstractTraditionally, monochromatic wavelength interferometry is applied to the measurement of smoo...
A convolution and fast Fourier transform methods are proposed separately to analysis a set of interf...
Laser interferometry 9 : International conferences : Jul 1998, San Diego, CAIn sinusoidal phase-modu...
A new optical interferometery technique is to measure surfaces at the micro and nano-scales based on...
A vibration stabilized Wavelength Scanning Interferometer (WSI) is developed for online or in-proces...
The optical path difference (OPD) and amplitude of a sinusoidal wavelength scanning (SWS) are contro...
Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the ca...
The problems of combining ideas of phase shifting interferometry (PSI) and synthetic-wavelength tech...
A novel method to double the measurement range of wavelength scanning interferometry (WSI) is descri...
A method to obtain unambiguous surface height measurements using wavelength scanning interferometry ...
The mass production of high-precision components has created a demand for in-line inspection tools...
Wavelength scanning interferometry (WSI) is a technique for measuring surface topography that is cap...
Applications : Conference : Sep 1999, Pultusk, PolandTwo different sinusoidal wavelength-scanning (S...
The assessment of surface finish has become increasingly important in the field of precision enginee...
The uncertainty of measurements made on an areal surface topography instrument is directly influence...
AbstractTraditionally, monochromatic wavelength interferometry is applied to the measurement of smoo...
A convolution and fast Fourier transform methods are proposed separately to analysis a set of interf...
Laser interferometry 9 : International conferences : Jul 1998, San Diego, CAIn sinusoidal phase-modu...
A new optical interferometery technique is to measure surfaces at the micro and nano-scales based on...
A vibration stabilized Wavelength Scanning Interferometer (WSI) is developed for online or in-proces...
The optical path difference (OPD) and amplitude of a sinusoidal wavelength scanning (SWS) are contro...
Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the ca...
The problems of combining ideas of phase shifting interferometry (PSI) and synthetic-wavelength tech...